ISO 9001:2008

Precision Parts Cleaning

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Precision Parts Cleaning
Precision Parts Cleaning

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Our reputation for excellence rests on over 50 years of Ultra High Vacuum expertise. We specialize in decontaminating, refurbishing, and cleaning OEM process tool components for the following applications:

  • Physical Vapor Deposition (PVD)
  • Chemical Vapor Deposition (CVD)
  • Etch
  • Ion Implant
  • Thin Film
  • Metrology
  • Photo Lithography
    Our processes meet or exceed the most stringent requirements in the industry

  • Class 100 Clean Room
  • In-House Laboratory
  • Surface Analysis
  • ISO 9001:2008
    Refurbishment Services (outsourcing certain services)

  • CO2 Cleaning 
  • Twin Wire Arc Spray (TWAS)
  • De-burring
  • Decontamination
  • Fabrication and Spares
    Analytical Services

  • Liquid Particle Count
  • Non-Volatile Residue
  • ICPMS
  • SEM

Markets Served

Cleaning and Monitoring Capabilities

Aqueous Cleaning
  • 18 Mega Ohm DI Water for process set-up and rinse
  • Acidic, Neutral, and Alkaline Detergents
  • Na-Free Detergent
  • Pressure Washers and UltraSonic / MegaSonic Capabilities
Monitoring & Analytical Capabilities
  • Particle Count: On surfaces, airborne, in liquids Available particle testers: Met1, Q III, Fluke 983
  • Smallest Channel: 0.3 micro meter, CLS700: Smallest channel: 0.2 micro meter
  • Swipe/Free Iron Test
  • Visual Inspection: Microscopic, Bright Light, Black Light, Auxiliary optical tools for estimating particles and scratch size

Precision Parts Cleaning Capabilities

Type of Cleaning
  • Chemical and Mechanical
  • Aqueous
  • Solvent
  • Ultrasonic/Megasonic
  • High Pressure
Chemical Cleaning Process
  • Degreasing
  • Ultrasonic
  • Stripping
  • Selective Etching
  • Oxidizing & Reducing Agents
  • Alkali/Acid Etchants
  • Deionized Water Rinse (Class 1000)
Mechanical Cleaning Process
  • High Pressure
  • Precision Bead Blasting
  • CO2/Snow cleaning
  • Abrasives with Chemically Neutral Agents
Clean Room
  • Class 100
  • Class 1000
  • Nitrogen Purged Ovens
  • Dark Room (UV Light Inspection)
Contaminants Removed
  • Organics
  • Hydrocarbons
  • Oil
  • Grease
  • Cutting Fluids
  • InorganicSolids
  • Metals
  • Oxides
  • Scale
  • Hydroxides
  • Particles (sub-micron)
  • Thin/Thick Film (CVD, PVD)
  • Coating
Components
  • Systems
  • Forelines
  • Pumps
  • Heaters
  • Shields
  • Platens
  • Shutters
  • Process Chamber Doors
  • Transfer Plates
  • Bell Jars
  • Roughing Lines
  • Process Chambers
  • Epitaxy Systems
  • CVD & PVD
  • Valves
  • Ion Sources
  • Diffusion Pumps
  • Wave Guides
  • Pipes
  • Hoses
  • Electrical Components
  • PCBA
  • Bellows
  • Cables
  • Sub-Assemblies
Deionized Rinse
  • 18 MΩ, Ambient/Hot
Media
  • High-Purity Alumina Oxide
  • Glass
  • CO2/Snow
Materials Cleaned
  • All Metals/Alloys including:
  • Stainless Steel
  • Aluminum
  • Titanium
  • Tantalum
  • Ceramics: Quartz/Silica/Alumina
  • Glass
  • Molybdenum
  • Sapphire
  • Polymers/ Plastics:Teflon, Polycarbonate, Viton, PTFE, Peek, etc.
  • Si &SiC
  • Brass
  • Copper
  • Nickel
  • Coated/Plated parts
Finish
  • Cosmetic Detailing (Limited)
Surface Texture
  • Achievable Roughness Average (Ra): 50-600 um/in
Available Packaging Materials
  • Ultra-Low Outgassing Polyethylene (ULO)
  • Nylon
  • UHV Foil
  • Lint Free Cloth
  • Aluminum Barrier Foil
Max Tank Capacity (Length x Width x Height)
  • 10' x 6' x 6'
Parts Processing (Within Cleanroom)
  • Dimensions: 9'x 4'x 4'
  • Max Weight: 600lbs
Parts Processing (Outside Cleanroom)
  • Dimensions: Varied
  • Max Weight: 2 Tons
High Pressure Cleaning
  • Various Degreasing Agents (Customer Request)
Additional Services
  • HeliCoil Installation
  • Disassembly
  • Assembly
Chemical Analytic Laboratory
  • PhD Chemist, AA, Tank Monitoring, Process Control
Inspection Capabilities
  • Multiple Gates (Incoming, Production, Final)
  • UV Light / Darkroom
  • Visual
  • Cosmetic
  • Microscope(up to 200x)
  • Endoscope
Testing
  • Liquid Particle Count
  • Non Volatile Residue (NVR)
  • Water Break
  • Swipe/Optical Counting of Particles
  • Free Iron Test
  • Particle Flow Test
  • Insulation Resistance
Quality
  • QC Gates
  • Tracking Systems
  • Certificate of Conformance (CoC)
  • Test and Inspection Report (TiR)
Outside Services
  • Leak Detection
  • TiG Welding
  • Decontamination
  • Plating/Coating/Electro Polishing
Production Volume
  • Minimum Lot to Large Capacity
Typical Lead Time
  • 3 Days (Standard)
  • Expedite Services Available
  • (24 hour upon availability)

Additional Information

Industry Focus
  • Semiconductor
  • Optics
  • Life Science
  • Defense/Military
  • Aerospace
  • Research
  • Nanotechnology
  • Disk Drive
  • Energy
  • Telecommunications
  • Vacuum Environments
Intended Applications
  • Evaporation Sources
  • Sputter Systems
  • Vacuum Systems
  • Process Equipment
  • Ion Implanters
  • Thin Film Deposition
  • Semiconductor Processing
  • Wafer Fabrication
  • Medical Devices
  • Other Process Equipment
  • Ion Pumps
  • Manipulators
  • Feedthroughs
  • Valves
  • Flanges
  • Magnetic Devices
Industry Standards
  • ISO
  • MILITARY
  • ASTM
  • IEST
File Formats
  • CAD, PDF, DOC, XCEL

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