ISO 9001:2008

Thermionics Laboratories Inc.

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e-GunVacuum Chamber6-axis Manipulator

Thermionics Laboratories designs and manufactures vacuum components, systems and accessories for production and research applications including our VE-160 and VE 240 PVD coating system; our line of LHe cooled manipulators; our line of compact manipulators; our 15kW ICR 1500cc capacity eGun™; our RC series of 3kW e-Guns™; HC series 6kW to 15 kW e-Guns™ with dual filament capability for demanding production coating applications; PyraFlat™ rectangular flanges and waveguides; TriMetl™ aluminum to stainless and copper to stainless flanges and fittings; gate and poppet valves; sample handling and transfer systems; ion pumps; maTChed™ thermocouple gauges; mechanical, electrical, and fluid feedthroughs; and materials and surface science systems.


  • High Vacuum Pumps
  • Manipulators and Mechanica Feedthroughs
  • e-Guns™
  • Vacuum Coating Systems
  • Valves
  • Flanges and Fittings
  • Pyraflat™ and TriMetal™ Flanges
  • Mechanical Feedthroughs
  • Electrical Feedthroughs
  • Vacuum Pressure Gauges
  • Helium Leak Detectors

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Markets Served

Thermionics Vacuum Capabilities

Value Added Services
  • Chemical and Process Engineering
  • Inspection
  • Spec Customization
  • Pickup/Delivery
  • Cleanliness Verification
  • After Sales Support
  • Consulting
  • Logistics
  • Supplier Referral
Outside Services
  • Machining/Manufacturing
  • Twin Wire Arc Spray
  • Off Site Cleaning
  • Plating & Coating
Inspection
  • Visual
  • Cosmetic
  • Microscope(up to 200x)
Testing
  • LiquidParticle Count
  • Non Volatile Residue (NVR)
  • Water Break
  • Swipe
Quality
  • QMS
  • Parts Tracking System
  • Certificate of Conformance

Additional Information

Industry Focus
  • Semiconductor
  • Optics
  • Life Science
  • Aerospace
  • Research
  • Nanotechnology
  • Disk Drive
  • Energy
  • Telecommunications
  • Vacuum Environments
Intended Applications
  • Process Equipment
  • Evaporators
  • Sputter Systems
  • Vacuum Systems
  • Ion Implanters
  • Thin Film Deposition
  • Semiconductor Processing
  • Wafer Fabrication
  • Medical Devices
  • Other Process Equipment
  • Ion Pumps
  • Manipulators
  • Feedthroughs
  • Valves
  • Electron Beam Evaporation Sources
  • Flanges
  • Magnetic Devices
Industry Standards
  • ISO 9001:2008
  • Mil-Spec
  • ASTM
  • IEST
  • Ultra High Vacuum
  • Internal Recipes (CLN)
File Formats
  • PDF, CAD, DOC, XCEL

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